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LFOV DIC

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LFOV DICThe use of Differential Interference Contrast (DIC) with large format line scan sensors and high resolution optics enable semiconductor

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Differential Interference Contrast
The use of Differential Interference Contrast (DIC) with large format line scan sensors and high resolution optics enable semiconductor, FPD, electronics and other industries to quickly image subtle surface structures and details which are not normally visible. The ability to image and subsequently analyze these structures leads to greater manufacturing
efficiencies and production throughput.
Automated Focus and Illumination
The LFOV DIC microscope is able to incorporate any one of WDIs Autofocus Sensors and High Power LED illumination options to create a compley autonomous inspection system. The flexibility in autofocus and illumination allows the LFOV DIC to be used in a wide variety of manufacturing applications including semiconductor, FPD, OLED, packaging and photovoltaic and solar panel inspection.
Practical Design
To meet the requirements of in line manufacturing, the LFOV DIC microscope features rugged industrial components, a small
footprint and low weight. Its modular nature allows it to be compley upgradable, ensuring the best performance for all
 

current and future applications.

  

LARGE FIELD OF VIEW DIC MODULAR MICROSCOPE

Objectives (Single Lens System)*Magnification5X10X20X
Numerical Aperture0.150.30.45
Working Distance20mm11mm3.1mm
Field of View26.526.526.5
DIC OpticsPolarizerIntegrated Fixed Polarizing Beam Splitter
Apodizing FilterIntegrated Fixed Apodizing Filter
AnalyzerAdjustable Dichroic Analyzer
DIC PrismAdjustable DIC Prism
Motorized Z ActuatorType1/32 Stepper Motor
Travel10mm (±5mm)
Maximum Resolution0.156μm/step
Maximum Speed10mm/sec
Maximum Acceleration100 mm/s2
AutofocusIntegrated WDI Autofocus SensorModel and Wavelength options available
IlluminationIntegrated WDI High Powered LEDColour and Intensity options available
Cameras/Sensor Support**TypeArea Scan or Line Scan TDI Sensor
Maximum Image Size28mm Diagonal
MountC-Mount or F-Mount (other options available)
Electrical Requirements10°C ~ 30°C24V Nominal
Operating Temperature10°C ~ 30°CAmbient
Operating Humidity< 70%Non Condensing
 


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