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IMM-200 Thin Film Deposition Monitor

参考价面议
具体成交价以合同协议为准

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详细信息 在线询价

  • 概述
  • 规格
  • 零件号
  • 附件
  • 耗材
  • 下载

功能

  • INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Maximize yield with the best QCM thickness measurement possible
  • Single channel rate and thickness monitor without unnecessary added features to minimize cost
  • ±0.0035 Hz over 100 ms sample
  • Ethernet communications for seamless integration
  • Compact size to minimize integration costs by saving tool real estate
  • Expert application support, able to discuss unique application needs and give greater support than the competition
  • RoHS compliant

典型应用

  • Semiconductor Manufacturing
  • OLED Applications

规格

类型 IMM-200
Measurement  
Sensor inputs 1
测量频率范围 6.0 to 4.5 MHz (fixed)
Reference frequency stability ±2 ppm 0-60°C
频率分辨率 ±0.0035 Hz @ 6 MHz
Rate and thickness resolution 0.0042 Å (new crystal); 0.0076 Å (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0
Measurement interval 100 ms
Measurement technique ModeLock
Operation and Dimensions  
Input voltage 24 V (dc)
工作温度 0 to 50°C (32 to 122°F)
Size 222.6 mm (8.76 in.) x 106.1 mm (4.18 in.) x 35.3 mm (1.39 in.)
Weight 0.48 kg (1.05 lbs.)
Communication type Ethernet, 1 RJ45 jack

零件号

IMM-200
零件号 明细
785-602-G1 IMM-200 Thin Film Deposition Monitor

附件

零件号 明细
Optional Power Supplies The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum.
961-021-G1 MPH 电源,80 - 250 VAC / 4 ft (1.2m) 美式插头
961-021-G2 MPH 电源,80 - 250 VAC / 4 ft (1.2 m) 美式插头,带 15 ft (4.5m) 延长电缆
961-021-G3 MPH 电源,80 - 250 VAC / 4 ft (1.2 m) 美式插头,带 30 ft (9m) 延长电缆
961-021-G4 MPH 电源,80 - 250 VAC / 4 ft (1.2 m) 230V 插头
961-021-G5 MPH 电源,80 - 250 VAC / 4 ft (1.2 m) 230V 插头,带有 15 ft (4.5m) 延长电缆
961-021-G6 MPH 电源,80 - 250 VAC / 4 ft (1.2 m) 230V 插头,带有 30 ft (9m) 延长电缆
961-021-G7 Power Supply Kit IL 240V
961-021-G8 Power Supply Kit IL 4.5 M Extension
961-021-G9 Power Supply Kit IL 9.0 M Extension
961-021-G10 Power Supply Kit UK 240V
961-021-G11 Power Supply Kit UK 4.5 M Extension
961-021-G12 Power Supply Kit UK 9.0 M Extension
Optional Mounting Bracket
785-202-G1 Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet
785-201-G1 Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet
Optional Communications Cable
600-1190-P1 ETHERNET COMUNICATION CABLE 1 METER
600-1190-P2 SPEC- ETHERNET COMMUNICATION CABLE .3M
600-1190-P4 ETHERNET COMUNICATION CABLES 4.3 METER
600-1190-P8 Cable, Ethernet Communication, 7.6 Meter
600-1190-P15 ETHERNET COMUNICATION CABLE 15.3 METER

耗材

名称 说明
石英监控器晶体 石英监控器晶体

手册

  • IMM-200 Operating Manual (English) |中文| |EN| |DE| |ES| |日文| |한국|


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