The production system Tetra 5600, with its 5600-litrechamber volume and PC control, is used in series production (cleaning, etchingａnd activation).
Special plasma system Tetra 5600-LF-PC
Technical data:
Switch cabinet:
W 1800 mm, H 2200 mm, D 1800 mm
Chamber:
W 2250 mm, H 2450 mm, D 1000 mm
Chamber volume:
approx. 5600 litres
Gas supply:
3 gas channels via MFCs
Generator:
6 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Parts holding:
loading via roll wagons
(optional: special drum)
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