类型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar |
精度 (1) | % of reading | 0.4 | 0.4 |
温度效应 | | |
零点 | percent FS/°C | 0.005 | 0.005 |
满量程 | % of reading / °C | 0.02 | 0.02 |
压力,大 | kPa (absolute) | 400 | 260 |
分辨率 | percent FS | 0.003 | 0.003 |
低读数 | percent FS | 0.01 | 0.01 |
建议的低读数 | percent FS | 0.05 | 0.05 |
建议的低控制压力 | percent FS | 0.5 | 0.5 |
温度 | | |
运行(室内环境)(4) | °C | +10 … +50 | |
在法兰处烘烤 | °C | ≤200 | ≤200 |
贮存 | °C | –40 … +65 | –40 … +65 |
电源电压 | | +21 … +30 V DC or ±15 V (±5%) | +21 … +30 V DC or ±15 V (±5%) |
功耗 | | |
加热时 | W | ≤25 | ≤25 |
运行温度 | W | ≤18 | ≤18 |
输出信号(模拟) | V (dc) | 0 … +10 | 0 … +10 |
反应时间 (2) | ms | 30 | 30 |
保护等级 | | IP 40 | IP 40 |
标准 | | |
CE 合规 | | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS |
ETL 认证 | | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 |
SEMI 合规 | | SEMI S2 | SEMI S2 |
电气连接 | | D-Sub, 15-pin, male | D-Sub, 15-pin, male |
设定点 | | |
设定点数量 | | 2 (SP1,SP2) | 2 (SP1,SP2) |
继电器触点 | | ≤30 | ≤30 |
滞后 | percent FS | 1 | 1 |
诊断端口 | | |
协议 | | RS232-C | RS232-C |
读数 | | pressure, status, ID | pressure, status, ID |
设置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
暴露于真空的材料 | | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) |
内部容积 | | |
内部容积 1/2'' 管 | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
内部容积 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
内部容积 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
内部容积 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
重量 | | |
重量 1/2'' 管 | g | 837 | 837 |
重量 DN 16 ISO KF | g | 852 | 852 |
重量 DN 16 CF-R | g | 875 | 875 |
重量 8 VCR® | g | 897 | 897 |
EtherCAT | | |
协议 EtherCAT | | protocol specialized for EtherCAT | protocol specialized for EtherCAT |
通讯标准 | | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
节点地址 | | Explicit Device Identification | Explicit Device Identification |
物理层 | | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) |
数字功能读取 | | pressure, status, ID | pressure, status, ID |
数字功能设置 | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
(CoE) | | SDO requests, responses and information | SDO requests, responses and information |
过程数据 | | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping |
EtherCAT 连接器 | | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT |
电缆 | | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher |
电缆长度 | m (ft.) | ≤100 (330) | ≤100 (330) |
Signal processing time | ms | 2 | 2 |
DeviceNet™ | | |
协议 | | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only |
数据率 | kBaud | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable |
电缆长度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) |
电缆长度 250 kbps | m (ft.) | 250 (825) | 250 (825) |
电缆长度 500 kbps | m (ft.) | 100 (330) | 100 (330) |
MAC ID | | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable |
数字功能读取 | | pressure, status, ID | pressure, status, ID |
数字功能设置 | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
技术规格 | | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) |
设备类型 | | ''VG'' vacuum gauge | ''VG'' vacuum gauge |
I / O 从属传讯 | | polling only | polling only |
真空计 D 型连接器的电源电压 | | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W |
为微型连接器上的 DeviceNet 收发器提供电压 | | 24 V nom / <2 w="" (11="" …="" 25="">2> | 24 V nom / <2 w="" (11="" …="" 25="">2> |
DeviceNet™ 连接器 | | microstyle, 5 pin, male | microstyle, 5 pin, male |
CDG(模拟输出、CDG 电源电压、设定点)连接器 | | D-sub, 15 pin, male | D-sub, 15 pin, male |
Profibus DP | | |
波特率 | | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
地址 | | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable |
数字功能读取 | | pressure, status, ID | pressure, status, ID |
数字功能设置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
Profibus DP 连接器 | | D-sub, 9 pin, female | D-sub, 9 pin, female |
CDG(模拟输出、电源电压、设定点)连接器 | | D-sub, 15 pin, male | D-sub, 15 pin, male |