Mahr replace with the MarSurf UD 130 the successful MarSurf UD 120 and closed the gap between the high end solution MarSurf LD 130/LD 260 and the standard combination measuring station MarSurf XCR 20 with two drive units.The technical specification of the MarSurf UD 130 is far superior to that of the MarSurf UD 120: in particular, the measuring and positioning speeds have reduced the measuring t
| 量速度（文本） | 0.1 mm/s to 5 mm/s; |
| 扫描长度末尾（X 方向） | 130 mm |
| 分辨率 | 2 nm |
| 扫描长度开始（X 方向） | 0.1 mm |
| 定位速度（文本） | 0.1 mm/s to 30 mm/s |
| 输入 | Standard probe LP-D 14-10-2/60° |
| 测量范围 mm | 10 mm (100 mm probe arm) |
| 轮廓分辨率 | 2 nm |
| 扫描长度（文本） | 0.1 mm to 130 mm |
| 测量力 (N) | 1 mN to 30 mN, software-adjustable |
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